The modern stage of electronics development is connected with the use of new functional materials with unique physical and chemical properties. Today, the different types of nanosize film materials are applied: multicomponent materials, including high-entropy film alloys (НЕА); granular film materials; ordered solid solutions (s.s.); film alloys with different degrees of entropy. HEA contain at least 5 main metallic elements, the atomic percentage of each of which ranges from 5 to 35%. In the obtained compounds, a single-phase stable solid substitution solution (mainly fcc or bcc lattice) is formed, which is strong and thermodynamically stable (see, for example, [1]).